Lithographic mask attraction system

Details Lithographic mask attraction system Lithographic mask attraction system

1975-01-06

1976-08-10

Smith, Alfred E.

Radiant energy

Automatic/serial detection of similar sources

101467, 250320, 250480, 250492A, 355 12, G03C 516, G03D 1308, G03G 1500, G21K 500

Patent

active

039743829

ABSTRACT:
An electrical voltage is connected between a flexible soft-X-ray mask and a substrate causing the mask to make intimate contact and thereby conform to slight irregularities of the surface of the X-ray sensitive polymer on the substrate to minimize the effect of these irregularities during exposure to soft-X-rays.

REFERENCES:
patent: 3685906 (1972-08-01), Raterman
patent: 3715156 (1973-02-01), Levy
patent: 3732429 (1973-05-01), Braunstein et al.
patent: 3743842 (1973-07-01), Smith et al.

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