Lithographic linear motor, lithographic apparatus, and...

Details Lithographic linear motor, lithographic apparatus, and... Lithographic linear motor, lithographic apparatus, and...

2006-08-22

2006-08-22

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000, C310S012060

Reexamination Certificate

active

07095485

ABSTRACT:
A linear motor having a high driving force, high efficiency and low normal force comprises two opposed magnet tracks and an armature comprising three open coil sets. The linear motor may be used to drive a stage, such as, for example, a mask or wafer stage, in a lithographic apparatus.

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European Search Report in reference to EP 03 25 1455 dated Jan. 30, 2004.

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