Lithographic lens wavefront and distortion tester

Details Lithographic lens wavefront and distortion tester Lithographic lens wavefront and distortion tester

1996-06-28

1998-09-29

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

G01B 902

Patent

active

058152687

ABSTRACT:
A measurement device (2) for measuring a collimated wave front through a lithographic lens includes a radiant energy source (4), a lens group (6) for collimating light emitted from said radiant energy source and directing said collimated light (7) toward a reference surface (10). A first binary optic (12) disposed in line with said collimated light and located adjacent to an input conjugate of a lens under test. A second binary optic (18) is arranged in a spaced relationship and in line with said first binary optic for retroreflecting light passing through a lithographic lens disposed between said first and second binary optics. A recording system (8,9) is provided for recording an interference with the light retroreflected-reflected back through said lens and through said reference surface.

REFERENCES:
patent: 3506361 (1970-04-01), Erickson
patent: 4696572 (1987-09-01), Ono
patent: 4798468 (1989-01-01), Ohuchi

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