Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2009-02-20
2011-12-06
Glick, Edward (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S052000, C355S067000
Reexamination Certificate
active
08072575
ABSTRACT:
In an embodiment, a lithographic apparatus is arranged to transfer a pattern from a patterning device onto a substrate, wherein the lithographic apparatus includes an air shower and a temperature sensor positioned near the air shower for measuring the temperature of an air stream in the air shower. The temperature sensor is a thermocouple sensor, e.g., of a thermopile arrangement type. The thermocouple sensor includes a plurality of thermocouples in series, wherein a cold junction and a hot junction are provided, the cold junction being connected to a heat sink, and the hot junction being positioned into the air stream of the air shower.
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Schaareman Paulus Bartholomeus Johannes
Van Empel Tjarko Adriaan Rudolf
Artman Thomas R
ASML Netherlands B.V.
Glick Edward
Sterne Kessler Goldstein & Fox P.L.L.C.
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