Lithographic apparatus with a fluid combining unit and...

Details Lithographic apparatus with a fluid combining unit and... Lithographic apparatus with a fluid combining unit and...

2006-11-22

2011-10-25

Glick, Edward (Department: 2882)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000

Reexamination Certificate

active

08045135

ABSTRACT:
A system for tuning the refractive index of immersion liquid in an immersion lithographic apparatus is disclosed. Two or more immersion liquids of different refractive index are mixed together in order to achieve a desired refractive index. Further, the fluids may be conditioned and treated to maintain optical characteristics.

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