Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-03-14
2006-03-14
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S055000, C356S237400, C356S237500, C356S601000
Reexamination Certificate
active
07012672
ABSTRACT:
A lithographic projection apparatus and method of manufacturing devices using such an apparatus is presented. The apparatus includes a level sensor to measure the height of a wafer in a plurality of points. The height info is sent to a processor which is arranged to create a measured height map using input from the level sensor. In one embodiment of the invention, the processor is also arranged to calculate an average die topology using the measured height map in order to produce a raw height map of the surface of the substrate, and to detect any focus spots on said surface of said substrate using the raw height map. By subtracting the average die topology, focus spots can be located more accurately than before.
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patent: 5748323 (1998-05-01), Levinson
patent: 6208407 (2001-03-01), Loopstra
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European Search Report dated Aug. 14, 2003, in reference to EP 03 07 5698.
Broers Michael
Castenmiller Thomas Josephus Maria
Koenen Willem Herman Gertruda Anna
Van Rhee Tasja
Van Zon Alex
ASML Netherlands B.V.
Mathews Alan
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