Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-09-19
2006-09-19
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S073000, C269S021000
Reexamination Certificate
active
07110085
ABSTRACT:
A lithographic projection apparatus including a radiation system for providing a projection beam of radiation; a support structure for supporting a patterning device, the patterning device serving to pattern the projection beam according to a desired pattern; a substrate holder having a plurality of protrusions, the extremities thereof defining a substantially flat plane of support for supporting a substantially flat substrate, the substrate holder provided with the ability to provide a pressing force for pressing the substrate against the extremities of the protrusions, the protrusions in an edge zone of the substrate holder arranged to provide a substantially flat overhanging of the substrate in relation to the pressing force of the pressing means; and a projection system for projecting the patterned beam onto a target portion of the substrate. The lithographic projection apparatus is characterized in that the protrusions in an off-edge zone of the substrate holder are distributed so as to provide a substantial equal supporting area for each protrusion of the plurality of protrusions, the supporting areas being defined by a Voronoi diagram distribution associated to the protrusions. The lithographic apparatus offers a substrate holder with a reduced overlay and focus error.
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Maria Zaal Koen Jacobus Johannes
Ottens Joost Jeroen
Van Empel Tjarko Adriaan Rudolf
ASML Netherlands B.V.
Mathews Alan
Pillsbury Winthrop Shaw & Pittman LLP
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