Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2011-01-11
2011-01-11
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S067000, C355S069000, C372S038100, C372S057000
Reexamination Certificate
active
07868999
ABSTRACT:
A lithographic apparatus is disclosed that has a plurality of control circuits, each control circuit arranged to be connected to an associated radiation source of a plurality of radiation sources configured to generate pulses of radiation for projection onto a substrate and each control circuit arranged to control the energy of radiation pulses generated by that associated radiation source.
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Office Action as issued for Japanese Patent Application No. 2007-203330, dated Jul. 20, 2010.
Buurman Erik Petrus
Heintze Johannes
Trentelman Mark
ASML Netherlands B.V.
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
Whitesell-Gordon Steven H
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