Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-12-11
2007-12-11
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S067000
Reexamination Certificate
active
11169307
ABSTRACT:
A lithographic apparatus having a radiation beam inspection device including a barrier to the beam of radiation, the barrier having an aperture through which a portion of the beam of radiation passes; and a radiation sensor that determines the intensity of the radiation passing through the aperture and the position, relative to the aperture, of the point at which the radiation is incident on the radiation sensor.
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de Lima Monteiro, D.W. et al., “High-Speed Wavefront Sensor Compatible with Standard CMOS Technology”,Sensors and Actuators A109, 2004, pp. 220-230.
ASML Netherlands B.V.
Nguyen Henry Hung
Sterne Kessler Goldstein & Fox P.L.L.C.
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