Lithographic apparatus, projection system, method of...

Details Lithographic apparatus, projection system, method of... Lithographic apparatus, projection system, method of...

2007-01-30

2007-01-30

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000, C355S057000

Reexamination Certificate

active

10823772

ABSTRACT:
A projection system includes at least one projection device configured to receive a beam of radiation coming from a first object and project the beam to a second object. The projection system further includes a sensor configured to measure a spatial orientation of the at least one projection device and a processing unit configured to communicate with the at least one sensor. The processing unit is configured to communicate with a positioning device configured to adjust the position of at least one of the first object and the second object based on the measured spatial orientation of the at least one projection device.

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English translation of Korean Office Action issued in Korean Application No. 10-2004-0025255 dated Jan. 23, 2006.

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