Lithographic apparatus, projection apparatus and device...

Details Lithographic apparatus, projection apparatus and device... Lithographic apparatus, projection apparatus and device...

2008-04-01

2008-04-01

Fuller, Rodney (Department: 2862)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S077000

Reexamination Certificate

active

07352436

ABSTRACT:
A control system to control a position of a substrate table for a lithographic apparatus, including: a first detection device to generate a position signal representative of the position of the projection system, a second detection device to generate a projection system feed-forward signal, a comparative unit to generate a servo error signal by subtracting a signal representative of an actual substrate table position from a substrate table position reference signal and adding the projection system position signal, a control unit to generate a first control signal on the basis of the servo error signal, an addition unit to generate a second control signal by adding the feed-forward signal and the first control signal, and an actuator unit to actuate the substrate table to a desired substrate table position on the basis of the second control signal. The control system further includes a projection system position signal filter unit.

REFERENCES:
patent: 5184055 (1993-02-01), Ohishi et al.
patent: 5696590 (1997-12-01), Makita
patent: 7098990 (2006-08-01), Butler
patent: 2002/0140921 (2002-10-01), Morisada

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