Lithographic apparatus, position quantity controller and...

Details Lithographic apparatus, position quantity controller and... Lithographic apparatus, position quantity controller and...

2005-04-25

2008-12-23

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000

Reexamination Certificate

active

07468782

ABSTRACT:
A lithographic apparatus includes a first movable element and a first control system to control a position quantity thereof. Also, the lithographic apparatus includes a second movable element and a second control system to control a position quantity thereof. To reduce a tracking error, i.e., a relative error between the first and second movable parts, a feedforward table is provided which includes a feedforward table programming to generate a feedforward signal in synchronism with a setpoint signal to be provided to the first and second control systems. The feedforward is provided to the first control system to correct the position quantity of the first movable element so as to reduce the relative error between the position quantities of the first and second movable elements.

REFERENCES:
patent: 6259511 (2001-07-01), Makinouchi et al.
patent: 2002/0196421 (2002-12-01), Tanaka et al.
patent: 2003/0043354 (2003-03-01), Butler

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