Lithographic apparatus, method of manufacturing a device,...

Details Lithographic apparatus, method of manufacturing a device,... Lithographic apparatus, method of manufacturing a device,...

2007-10-16

2007-10-16

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S071000

Reexamination Certificate

active

10746156

ABSTRACT:
A lithographic projection apparatus is provided with a sensor for detecting one of luminescence radiation, desorbed particles, or free charges produced by an interaction of the projection beam with a material at surface of a substrate. The luminescence radiation, desorbed particles, or free charges are indicative of the dose delivered to the substrate, and can be detected close to the substrate or at the substrate level to avoid errors due to transmission variations in the optical path from the radiation source to the substrate.

REFERENCES:
patent: 4922098 (1990-05-01), Mori et al.
patent: 4929083 (1990-05-01), Brunner
patent: 5004913 (1991-04-01), Kleinerman
patent: 5081635 (1992-01-01), Wakabayashi et al.
patent: 5892573 (1999-04-01), Takahashi et al.
patent: 5898477 (1999-04-01), Yoshimura et al.
patent: 5929977 (1999-07-01), Ozawa
patent: 5999247 (1999-12-01), Tezuka
patent: 6411368 (2002-06-01), Matsumoto et al.
patent: 6630996 (2003-10-01), Rao et al.
patent: 6700646 (2004-03-01), Mulkens et al.
patent: 6806477 (2004-10-01), Saito et al.
patent: 7108960 (2006-09-01), Dierichs
patent: 0 445 871 (1991-09-01), None
patent: 1 039 510 (2000-09-01), None
patent: 62-204527 (1987-09-01), None

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