Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-12-17
2010-12-28
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
07859644
ABSTRACT:
A control system configured to control a position of a fluid supply system, the fluid supply system constructed and arranged to supply a fluid between a substrate and a projection system, the substrate positioned with a substrate stage, the control system including a controller configured to determine a desired position of the fluid supply system based on a position signal to be provided to the substrate stage and a position offset, the position offset added to the position signal to be provided to the substrate stage.
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Arends Antonius Henricus
Butler Hans
Cox Henrikus Herman Marie
Cuperus Minne
Draaijer Evert Hendrik Jan
ASML Netherlands B.V.
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
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