Lithographic apparatus, illumination system, illumination...

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems

Reexamination Certificate

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Details

C355S055000, C355S069000, C250S548000

Reexamination Certificate

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11184066

ABSTRACT:
A lithographic apparatus includes an illumination system configured to condition a radiation beam. The illumination system includes a pulsed source of radiation and a controller to control an output of the pulsed source of radiation. The controller includes a dose sensor to measure a dose of a pulse of the source of radiation. The dose sensor includes a dose sensor output to provide a dose signal representative of the measured dose. An integrator unit is connected to the dose sensor output. The integrator unit integrates the dose signal at least twice, an output of the integrator unit provides an integrator output signal including the at least twice integrated dose signal. The output of the integrator unit drives a driving input of the source of radiation with the integrator output signal.

REFERENCES:
patent: 6538723 (2003-03-01), Hagiwara
patent: 2003/0103196 (2003-06-01), Hirukawa
patent: 2004/0021840 (2004-02-01), Heintze
patent: 2005/0264777 (2005-12-01), Gardner
patent: 2006/0055908 (2006-03-01), Urban et al.

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