Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2005-12-28
2009-02-03
Souw, Bernard E (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S365000, C250S492100, C250S370080, C250S370090, C250S492200, C378S034000, C378S156000, C359S350000, C359S351000, C315S111210, C362S263000
Reexamination Certificate
active
07485881
ABSTRACT:
A lithographic apparatus includes an illumination system configured to condition a radiation beam, a projection system configured to project the radiation beam onto a substrate, and a filter system for filtering debris particles out of the radiation beam. The filter system includes a plurality of foils for trapping the debris particles, a support for holding the plurality of foils, and a cooling system having a surface that is arranged to be cooled. The cooling system and the support are positioned with respect to each other such that a gap is formed between the surface of the cooling system and the support. The cooling system is further arranged to inject gas into the gap.
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Bakker Levinus Pieter
Moors Johannes Hubertus Josephina
Schuurmans Frank Jeroen Pieter
Wassink Arnoud Cornelis
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Souw Bernard E
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