Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-12-25
2007-12-25
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S077000, C359S850000
Reexamination Certificate
active
10816170
ABSTRACT:
A lithographic projection apparatus includes an illumination system having a reflective integrator with a rectangular cross-section. An optical element is provided to redistribute an intensity distribution exiting the reflective integrator.
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Botma Hako
Mulder Heine Melle
ASML Netherlands B.V.
Mathews Alan
Pillsbury Winthrop Shaw & Pittman LLP
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