Lithographic apparatus, illumination system, and optical...

Photocopying – Projection printing and copying cameras – Illumination systems or details

Reexamination Certificate

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Details

C355S053000, C355S077000, C359S850000

Reexamination Certificate

active

10816170

ABSTRACT:
A lithographic projection apparatus includes an illumination system having a reflective integrator with a rectangular cross-section. An optical element is provided to redistribute an intensity distribution exiting the reflective integrator.

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