Lithographic apparatus having feedthrough control system

Details Lithographic apparatus having feedthrough control system Lithographic apparatus having feedthrough control system

2007-03-29

2010-12-07

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S075000, C355S077000

Reexamination Certificate

active

07847919

ABSTRACT:
An optical component of the lithographic apparatus is moved. A substrate support is moved so as to be synchronous with the motion of the optical component. A momentary position of the optical component is measured. A momentary position of the substrate support is measured at a first sampling rate. The measured momentary position of the optical component is compared with a desired momentary position of the optical component to generate an optical component position error signal in accordance with a difference between the two optical component positions. The measured momentary position of the substrate support is compared with a desired momentary position of the substrate support to generate a substrate support position error signal in accordance with a difference between the two substrate support positions. The momentary position of the optical component is adjusted so as to compensate for the difference between the two substrate support positions.

REFERENCES:
patent: 5402400 (1995-03-01), Hamada et al.
patent: 5696590 (1997-12-01), Makita
patent: 5841250 (1998-11-01), Korenage et al.
patent: 6359688 (2002-03-01), Akimoto et al.
patent: 6373072 (2002-04-01), Butler et al.
patent: 6727977 (2004-04-01), Butler

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