Lithographic apparatus for manufacturing a device

Details Lithographic apparatus for manufacturing a device Lithographic apparatus for manufacturing a device

2007-02-27

2007-02-27

Allen, Stephone B. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

C355S053000, C355S067000

Reexamination Certificate

active

10848583

ABSTRACT:
To calibrate a lithographic apparatus having a programmable patterning means, a sensor, such as a CCD, CMOS sensor or photo-diode array, having detector elements larger than the size of a spot corresponding to a single pixel of the programmable patterning means is used. Pixels are selectively activated singly or in groups.

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European Search Report for European Appln. 03253333.3 mailed Apr. 14, 2004.

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