Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2005-12-23
2010-10-19
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S071000
Reexamination Certificate
active
07817247
ABSTRACT:
A CD-pitch dependency for a lithographic pattern printing process is related to the spectral intensity distribution of radiation used for projecting the pattern. A CD-pitch dependency can vary from one system to another. This can result in an iso-dense bias mismatch between systems. The invention addresses this problem by providing a lithographic apparatus including an illumination system for providing a projection beam of radiation, a projection system for projecting a patterned beam onto a target portion of a substrate, and a substrate table for holding the substrate, with a controller to provide an adjustment of the spectral distribution of radiant intensity of the projection beam. The adjustment of the spectral intensity distribution is based on data relating to an iso dense bias, and comprises a broadening of the spectral bandwidth or a change of shape of the spectral intensity distribution.
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U.S. Appl. No. 11/019,531, filed Dec. 23, 2004, Robertus Cornelis Martinus De Kruif.
English translation of Official Action issued on Mar. 31, 2009 in Japanese Application No. 2005-381198.
Bruls Richard Joseph
Buurman Erik Petrus
De Kruif Robertus Cornelis Martinus
Teeuwsen Johannes Wilhelmus Maria Cornelis
ASML Netherlands B.V.
Kim Peter B
Pillsbury Winthrop Shaw & Pittman LLP
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