Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2005-06-17
2010-11-30
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S072000
Reexamination Certificate
active
07843552
ABSTRACT:
The mechanical properties of a pellicle frame and/or the pellicle are optimized so that the mechanical effect of the frame and pellicle on the mask shape in use is optimum for imaging. In particular the pellicle frame assembly may be arranged to be mechanically neutral, i.e., the mask adopts the same shape with pellicle attached as it would without the pellicle.
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patent: 6406573 (2002-06-01), Cerio
patent: 6731378 (2004-05-01), Hibbs
patent: 6795170 (2004-09-01), Mishiro et al.
patent: 6911283 (2005-06-01), Gordon et al.
patent: 2003/0035222 (2003-02-01), Okada et al.
patent: 2005/0048376 (2005-03-01), Eschbach et al.
Boom Herman
Bruls Richard Joseph
Cicilia Orlando Serapio
Uitterdijk Tammo
ASML Netherlands B.V.
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
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