Lithographic apparatus, device manufacturing method, and...

Photocopying – Projection printing and copying cameras – Detailed holder for original

Reexamination Certificate

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C355S072000

Reexamination Certificate

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07843552

ABSTRACT:
The mechanical properties of a pellicle frame and/or the pellicle are optimized so that the mechanical effect of the frame and pellicle on the mask shape in use is optimum for imaging. In particular the pellicle frame assembly may be arranged to be mechanically neutral, i.e., the mask adopts the same shape with pellicle attached as it would without the pellicle.

REFERENCES:
patent: 6406573 (2002-06-01), Cerio
patent: 6731378 (2004-05-01), Hibbs
patent: 6795170 (2004-09-01), Mishiro et al.
patent: 6911283 (2005-06-01), Gordon et al.
patent: 2003/0035222 (2003-02-01), Okada et al.
patent: 2005/0048376 (2005-03-01), Eschbach et al.

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