Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-12-22
2010-06-29
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000, C355S072000
Reexamination Certificate
active
07746447
ABSTRACT:
An immersion lithographic apparatus has a plurality of substrate holders arranged to hold substrates, each substrate holder having a conduit therein for passing a temperature control fluid. The thermal responses of the different substrate holders are calibrated and flow rates calculated and used so that all the holders return to a predetermined temperature in the same time.
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English Translation of the Notice of Reasons for Rejection as issued for JP Patent Application No. 2006-338021, dated Nov. 12, 2009.
De Jong Frederik Eduard
Jacobs Johannes Henricus Wilhelmus
Loopstra Erik Roelof
Maria Zaal Koen Jacobus Johannes
Ottens Joost Jeroen
ASML Netherlands B.V.
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
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