Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2008-05-20
2008-05-20
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C355S072000, C356S400000
Reexamination Certificate
active
11018930
ABSTRACT:
Substrate processing apparatus includes a lithographic apparatus which comprises an illumination system for supplying a projection beam of radiation, an array of individually controllable elements serving to impart the projection beam with a pattern in its cross-section, and a projection system for projecting the patterned beam onto a target portion of a substrate. The processing apparatus also includes a substrate supply arranged to output at least one unbroken length of substrate, and a substrate conveying system arranged to convey each outputted unbroken length of substrate from the substrate supply and past the projection system such that the projection system is able to project the patterned beam onto a series of target portions along each unbroken length of substrate. In certain embodiments, long lengths of substrate are supplied from a roll, but alternatively a series of separate sheets can be supplied.
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Fluit Jeroen
Lof Joeri
Luttikhuis Bernardus Antonius Johannes
Spit Peter
ASML Netherlands B.V.
Rutledge D.
Sterne Kessler Goldstein & Fox P.L.L.C.
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