Lithographic apparatus, device manufacturing method and...

Details Lithographic apparatus, device manufacturing method and... Lithographic apparatus, device manufacturing method and...

2007-10-09

2007-10-09

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S077000

Reexamination Certificate

active

10820228

ABSTRACT:
In a scanning exposure, the short stroke module accelerates the mask or substrate table with a higher acceleration that the long stroke module. The short stroke module starts at or near (proximate) one extreme of its range of motion and catches up to the long stroke module during the scan. The long stroke module starts to decelerate earlier but the short stroke decelerates faster so that the short stroke overtakes the long stroke and ends up at the other extreme of its range of motion. The acceleration times can be reduced without increasing the forces exerted by the long stroke actuators so there is less of an increase in dissipation and reaction forces.

REFERENCES:
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6008610 (1999-12-01), Yuan et al.
patent: 6046792 (2000-04-01), Van Der Werf et al.
patent: 6597433 (2003-07-01), Renkens et al.
patent: 6809798 (2004-10-01), Fujita
patent: 7016019 (2006-03-01), Van Den Biggelaar et al.
patent: 2002/0185983 (2002-12-01), Poon et al.
patent: 1 262 835 (2002-12-01), None
patent: 10-116779 (1998-05-01), None
patent: 2004-153094 (2004-05-01), None
patent: WO98/33096 (1998-07-01), None
patent: WO98/38597 (1998-09-01), None
patent: WO98/40791 (1998-09-01), None

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