Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2007-01-09
2007-01-09
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S075000, C279S128000
Reexamination Certificate
active
10890379
ABSTRACT:
A lithographic projection apparatus includes a radiation system for providing a beam of radiation, and a substrate holder. The substrate holder includes a plurality of protrusions for providing a substantially flat plane of support for supporting a substrate in a beam path of the beam of radiation, at least one clamping electrode for generating an electric field for clamping the substrate against the substrate holder, and a peripheral supporting edge arranged to contact the substrate. The electrode extends beyond the peripheral supporting edge for providing a torsion load to level the substrate near the edges of the substrate.
REFERENCES:
patent: 4554611 (1985-11-01), Lewin
patent: 5094536 (1992-03-01), MacDonald et al.
patent: 5530616 (1996-06-01), Kitabayashi et al.
patent: 5532903 (1996-07-01), Kendall
patent: 5646814 (1997-07-01), Shamouilian et al.
patent: 5838529 (1998-11-01), Shufflebotham et al.
patent: 5886863 (1999-03-01), Nagasaki et al.
patent: 6268994 (2001-07-01), Logan et al.
patent: 6307620 (2001-10-01), Takabayashi et al.
patent: 6710857 (2004-03-01), Kondo
patent: 6768627 (2004-07-01), Kitabayashi et al.
patent: 2002/0159217 (2002-10-01), Tsuruta et al.
patent: 2003/0098965 (2003-05-01), Binnard et al.
patent: 2004/0114124 (2004-06-01), Hocks et al.
patent: 0 138 254 (1988-06-01), None
patent: 0 452 222 (1997-01-01), None
patent: 0 993 024 (2000-04-01), None
patent: 1 077 393 (2001-02-01), None
European Search Report for European Patent Application No. 03077222.2, completed Apr. 26, 2004.
Maria Zaal Koen Jacobus Johannes
Ottens Joost Jeroen
Van Empel Tjarko Adriaan Rudolf
ASML Netherlands B.V.
Fuller Rodney
Ohira Marissa A.
Pillsbury Winthrop Shaw & Pittman LLP
LandOfFree
Lithographic apparatus, device manufacturing method, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Lithographic apparatus, device manufacturing method, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic apparatus, device manufacturing method, and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3798241