Lithographic apparatus, device manufacturing method and...

Details Lithographic apparatus, device manufacturing method and... Lithographic apparatus, device manufacturing method and...

2007-05-29

2007-05-29

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S075000, C310S012060

Reexamination Certificate

active

10964818

ABSTRACT:
A lithographic apparatus includes a positioning system including a first and second electromagnetic actuator. Each actuator includes two mutually co-operating electromagnetical elements which are movable with respect to one another due to force acting on the elements of the respective actuator. At least one of the actuators includes a shield configured to shield the actuator from a field generated by the other actuator. In this manner, a disturbance force due to the field is prevented to act on the shielded actuator. The invention also includes a positioning system including such actuators.

REFERENCES:
patent: 6262797 (2001-07-01), Horikawa
patent: 6750571 (2004-06-01), Tominaga et al.
patent: 6753534 (2004-06-01), Novak et al.
patent: 2002/0074516 (2002-06-01), Novak et al.
patent: 2003/0155820 (2003-08-01), Tominaga et al.
patent: 1001512 (2000-05-01), None
patent: 1267209 (2002-12-01), None
patent: 2003-88088 (2003-03-01), None

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