Lithographic apparatus, device manufacturing method, and...

Details Lithographic apparatus, device manufacturing method, and... Lithographic apparatus, device manufacturing method, and...

2006-02-14

2006-02-14

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C347S239000, C347S241000, C359S494010

Reexamination Certificate

active

06999161

ABSTRACT:
Apparatus and methods for compensating for the movement of a substrate in a lithographic apparatus during a pulse of radiation include providing an optical structure configured to move a patterned projection beam incident on the substrate in synchronism with the substrate.

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patent: 2001/0010536 (2001-08-01), Katzir et al.
patent: 2001/0048515 (2001-12-01), Mei
patent: 1115031 (2001-07-01), None
European Search Report dated Oct. 1, 2003.

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