Lithographic apparatus, device manufacturing method, and...

Details Lithographic apparatus, device manufacturing method, and... Lithographic apparatus, device manufacturing method, and...

2006-08-01

2006-08-01

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S055000, C355S077000, C430S005000

Reexamination Certificate

active

07084952

ABSTRACT:
The change in a property of a lithographic apparatus (e.g. the change in magnification of the projection system due to lens heating effects) is predicted, and when the change since the last time an alignment task was performed is greater than a threshold, an additional alignment task is carried out. A realignment is triggered when the predictive correction, and hence the error in it, becomes larger than a desired maximum. This avoids unnecessary realignments but ensures that an alignment does occur when likely errors are out of permitted ranges.

REFERENCES:
patent: 4825247 (1989-04-01), Kemi et al.
patent: 5710620 (1998-01-01), Taniguchi
patent: 5854671 (1998-12-01), Nishi
patent: 2002/0005940 (2002-01-01), Hatada et al.

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