Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-11-28
2006-11-28
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S067000
Reexamination Certificate
active
07142287
ABSTRACT:
A lithographic apparatus is disclosed. The apparatus includes a radiation system that provides a beam of radiation, and a support structure that supports a patterning structure. The patterning structure is configured to pattern the beam of radiation according to a desired pattern. The apparatus also includes a substrate support that supports a substrate, and a projection system that projects the patterned beam onto a target portion of the substrate. The projection system includes an optical element that has a beam entry area and an optical element that has a beam exit area through each of which the patterned beam passes. The apparatus further includes a nucleated surface that is associated with the projection system on which a plurality of nucleation sites are provided. The surface is disposed away from at least one of the beam entry area and the beam exit area.
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International Search Report issued for PCT Application PCT/NL2004/000927 on Dec. 19, 2005.
Dirksen Peter
Kroon Mark
Kurt Ralph
Owen Cassandra May
Van Beek Michael Cornelis
ASML Netherlands B.V.
Kim Peter B.
Pillsbury Winthrop Shaw & Pittman LLP
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