Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2006-08-01
2006-08-01
Nguyen, Kiet T. (Department: 2881)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
07084953
ABSTRACT:
A lithographic projection apparatus includes conduits which supply utilities to components in a vacuum chamber such as object tables and/or associated motors and/or sensors. The conduits are shielded from exposure to the vacuum by conduit conducts having at least the same number of degrees of freedom as their associated object table.
REFERENCES:
patent: 3125492 (1964-03-01), Baker
patent: 4654571 (1987-03-01), Hinds
patent: 4993696 (1991-02-01), Furukawa et al.
patent: 5234303 (1993-08-01), Koyano
patent: 5247424 (1993-09-01), Harris et al.
patent: 5298939 (1994-03-01), Swanson et al.
patent: 5380246 (1995-01-01), Katahira
patent: 5811803 (1998-09-01), Komatsu et al.
patent: 5914493 (1999-06-01), Morita et al.
patent: 6190104 (2001-02-01), Ikeda et al.
patent: 6333775 (2001-12-01), Haney et al.
patent: 6445440 (2002-09-01), Bisschops et al.
patent: 6451507 (2002-09-01), Suenaga et al.
patent: 6459472 (2002-10-01), DeJager et al.
patent: 6465729 (2002-10-01), Granoff et al.
patent: 6603130 (2003-08-01), Bisschops et al.
patent: 1 018 669 (2000-07-01), None
patent: 1 052 549 (2000-11-01), None
patent: 1 052 550 (2000-11-01), None
patent: 1 052 551 (2000-11-01), None
patent: 1 052 553 (2000-11-01), None
patent: 58044719 (1983-03-01), None
patent: 7201694 (1995-08-01), None
patent: 2001085291 (2001-03-01), None
Bisschops Theodorus Hubertus Josephus
Driessen Johannes Cornelis
Renkens Michael Jozefa Mathijs
Rijken Antonius Maria
Soemers Hermanus Mathias Joannes Rene
Nguyen Kiet T.
Pillsbury Winthrop Shaw & Pittman LLP
LandOfFree
Lithographic apparatus, device manufacturing method and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Lithographic apparatus, device manufacturing method and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic apparatus, device manufacturing method and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3617155