Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-08-29
2006-08-29
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S075000
Reexamination Certificate
active
07098990
ABSTRACT:
A lithographic apparatus including a position control system to control a position of a moveable object is presented, The position control system includes a position controller, an object represented as an object filter, a position feedback circuit, and an acceleration control system. The acceleration control system includes a subtractor and a first filter in a first circuit branch and a second filter in a second circuit branch. A position controller signal output from the position controller is input into the subtractor of the acceleration control system. An external disturbance force, however, is directly exerted upon the object. Thus, a first transfer function from the input of the subtractor to the acceleration of the object for the position controller force may be different than a second transfer function from the input of the object to the acceleration of the object for the disturbance force. Preferably, the first transfer function is identical to a transfer function for the position controller force in case no acceleration control system is present in the position control system.
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Australian Patent Office Search Report, dated Sep. 14, 2005.
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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