Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-01-17
2006-01-17
Matthews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S055000, C355S077000, C250S548000
Reexamination Certificate
active
06987555
ABSTRACT:
According to one embodiment, a method of calibrating level sensors of at least two lithographic projection apparatus to correct machine to machine level sensor process dependency includes using a first lithographic projection apparatus to measure a first set of leveling data for a reference substrate and a second set of leveling data for a substrate processed according to a selected process, and using a second lithographic projection apparatus to measure a third set of leveling data for the reference substrate and a fourth set of leveling data for the processed substrate. The method also includes calculating, based on the first, second, third and fourth sets of leveling data, a set of level sensor parameters corresponding to machine to machine level sensor differences for the selected process, wherein the machine to machine level sensor differences are measured and stored as intrafield values.
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Nijmeijer Gerrit Johannes
Queens Rene Marinus Gerardus Johan
Staals Frank
Teunissen Paulus Antonius Andreas
Van Wijk Robert Jan
ASML Netherlands B.V.
Matthews Alan
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