Lithographic apparatus, device manufacturing method, and...

Details Lithographic apparatus, device manufacturing method, and... Lithographic apparatus, device manufacturing method, and...

2006-05-16

2006-05-16

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S077000

Reexamination Certificate

active

07046331

ABSTRACT:
A lithographic projection apparatus having at least two substrate holders is controlled to reduce effects of differences in images caused by differences between the two substrate holders. The apparatus includes an internal or external detector that identifies a substrate and associates it with a respective one of the substrate holders. A controller ensures that either the substrate is processed on the appropriate holder or that correction is applied to the imaging. In an alternate embodiment, the substrate is associated with a respective one of the substrate holders and is consistently processed using that substrate holder without further identification steps.

REFERENCES:
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patent: 6426790 (2002-07-01), Hayashi
patent: 6549269 (2003-04-01), Nishi et al.
patent: 6590636 (2003-07-01), Nishi
patent: 6788385 (2004-09-01), Tanaka et al.
patent: 6876439 (2005-04-01), Galburt et al.
patent: WO01/40875 (2001-06-01), None

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