Lithographic apparatus device manufacturing method and...

Details Lithographic apparatus device manufacturing method and... Lithographic apparatus device manufacturing method and...

2005-11-22

2005-11-22

Epps, Georgia (Department: 2873)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S291000, C359S849000

Reexamination Certificate

active

06967756

ABSTRACT:
A lithographic projection apparatus includes an active reflector in a radiation system providing a projection beam of radiation and/or in a projection system. The active reflector includes a body member, a reflective multilayer and at least one actuator controllable to adjust the surface figure of the reflecting multilayer, wherein the actuator exerts a substantial force component in a direction parallel to the surface figure of said reflective multilayer. The actuator may be operative to apply torques to said reflector.

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