Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2005-06-14
2005-06-14
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S071000
Reexamination Certificate
active
06906787
ABSTRACT:
A lithographic projection apparatus includes a radiation system for providing a projection beam of primary radiation, a support structure for supporting patterning structure, the patterning structure serving to pattern the projection beam according to a desired pattern, a substrate table for holding a substrate, a projection system for projecting the patterned beam onto a target portion of the substrate, a radiation sensor which is moveable in a path traversed by the projection beam, for receiving primary radiation out of the projection beam, the sensor including a radiation-sensitive material which converts incident primary radiation into secondary radiation, a radiation detector capable of detecting said secondary radiation emerging from said material, and a filter material for preventing secondary radiation from traveling in a direction away from the radiation detector.
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De Boeij Wilhelmus Petrus
Hemerik Marcel Maurice
Van De Kerhof Marcus Adrianus
ASML Netherlands B.V.
Pillsbury & Winthrop LLP
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