Lithographic apparatus, device manufacturing method, and...

Details Lithographic apparatus, device manufacturing method, and... Lithographic apparatus, device manufacturing method, and...

2005-06-14

2005-06-14

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000, C355S077000, C250S548000

Reexamination Certificate

active

06906785

ABSTRACT:
A method of calibrating level sensors of at least two lithographic projection apparatus to correct machine to machine level sensor process dependency includes measuring a first set of leveling data using a first lithographic projection apparatus for a reference substrate, measuring a second set of leveling data using the first apparatus for a substrate processed according to a selected process, measuring a third set of leveling data using the second apparatus for the reference substrate, measuring a fourth set of leveling data using the second apparatus for the processed substrate, and using the first, second, third and fourth sets of leveling data to calculate the set of level sensor parameters corresponding to machine to machine level sensor differences for the selected process.

REFERENCES:
patent: 5191200 (1993-03-01), van der Werf et al.
patent: 5204535 (1993-04-01), Mizutani
patent: 5461237 (1995-10-01), Wakamoto et al.
patent: 5657130 (1997-08-01), Shirasu et al.
patent: 5838595 (1998-11-01), Sullivan et al.
patent: 5960107 (1999-09-01), Leroux
Australian Patent Office Search Report for Application No. SG 200302267-0, dated Nov. 19, 2004.

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