Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2005-08-16
2005-08-16
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
06930753
ABSTRACT:
A lithographic projection apparatus including at least one temperature control member that at least partly surrounds at least one component selected from a group comprising mask and substrate tables, the projection system and an isolated reference frame for controlling the temperature of the surrounded components. The surface finish of the member is chosen to help keep the components which it partly surrounds isothermal during operation.
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Murphy et al., “Synchroton Radiation Sources and Condensers for Projection X-Ray Lithography,”Applied Optics, vol. 32, No. 24, 1993, pp. 6920-6929.
ASML Netherlands B.V.
Fuller Rodney
Pillsbury Winthrop Shaw & Pittman LLP
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