Lithographic apparatus, device manufacturing method and...

Details Lithographic apparatus, device manufacturing method and... Lithographic apparatus, device manufacturing method and...

2005-08-30

2005-08-30

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S072000

Reexamination Certificate

active

06937316

ABSTRACT:
A bellows used to connect two sealed compartments of the lithographic apparatus or a compartment and a pump, comprises a first section having smooth helical corrugations and a second section that can accommodate the longitudinal movement caused by relative rotation of the ends of the first section. The second section may be a mirror image of the first section or one or more sub-sections of circumferential corrugations.

REFERENCES:
patent: 3318335 (1967-05-01), Heller
patent: 4125130 (1978-11-01), Yamamoto
patent: 5050894 (1991-09-01), Merel et al.
patent: 5397157 (1995-03-01), Hempel et al.
patent: 6315332 (2001-11-01), Aschoff et al.
patent: 6714277 (2004-03-01), Hara et al.
patent: 6727981 (2004-04-01), Taniuchi et al.
patent: 6784972 (2004-08-01), Nagahashi et al.
patent: 2001/0028443 (2001-10-01), Yabu
patent: 2002/0159042 (2002-10-01), Poon
patent: 8200937.6 (1982-09-01), None
patent: 29823586 (1999-12-01), None
patent: 0627667 (1994-12-01), None
patent: 57076362 (1982-05-01), None
patent: 04151088 (1990-10-01), None
patent: 04157399 (1992-05-01), None

Affiliated with

Also associated with

Rating

Lithographic apparatus, device manufacturing method and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lithographic apparatus, device manufacturing method and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic apparatus, device manufacturing method and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3441037