Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-07-17
2007-07-17
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
10961408
ABSTRACT:
To compensate for birefringence of a mask in a lithographic projection apparatus, the birefringence of a mask is measured and stored as birefringence data in a data storage device. A birefringent compensation element is disposed in the optical path of the lithographic projection apparatus. Appropriate adjustments of the compensation element are determined as those optimally reducing impact of the mask birefringence on the state of polarization at substrate level.
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De Boeij Wil{acute over (h)}elmus Petrus
Kohler Carsten Andreas
Mulkens Johannes Catharinus Hubertus
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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