Lithographic apparatus, device manufacturing method,...

Details Lithographic apparatus, device manufacturing method,... Lithographic apparatus, device manufacturing method,...

2006-06-06

2006-06-06

Rutledge, D. (Department: 2851)

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Projection printing and copying cameras

Step and repeat

C355S067000, C355S069000, C250S492200, C362S005000, C362S018000

Reexamination Certificate

active

07057705

ABSTRACT:
A controller for a pulsed radiation source is a closed-loop controller of minimum order, preferably first, to effect dead beat control. Performance indicators for a pulsed radiation source in a lithographic apparatus are based on moving averages (MA) and moving standard deviations (MSD) of the error between target and actual pulse energies. The normalized indicators are given by:MAE,n⁡(xk)=1∑i=k-(Nslit-e-1)k⁢⁢Epref⁡(i)·∑i=k-(Nslit-e-1)k⁢⁢Eperr⁡(i)⁢⁢(k=Nslit-e⁢⁢…⁢⁢Nscan),wherein Epref(i) and Eperr(i) indicate reference energy per pulse and energy error per pulse for point i andMSDE,n⁡(xk)=1Nslit-e-1⁢∑i=k-(Nslit-e-1)k⁢[Eperr⁡(i)Epref⁡(i)-MAE,n⁡(xk)]2⁢⁢(k=Nslit-e⁢⁢…⁢⁢Nscan).

REFERENCES:
patent: 5982790 (1999-11-01), Grossman et al.
patent: 2001-244531 (2001-09-01), None
patent: WO 01/28048 (2001-04-01), None
patent: WO 01/28048 (2001-04-01), None

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