Lithographic apparatus, control system and device...

Details Lithographic apparatus, control system and device... Lithographic apparatus, control system and device...

2006-08-01

2006-08-01

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S053000

Reexamination Certificate

active

07084958

ABSTRACT:
A lithographic apparatus includes an illumination system configured to provide a beam of radiation; a support configured to support a patterning device, the patterning device configured to impart the beam with a pattern in its cross-section; a substrate table configured to hold a substrate; a projection system configured to project the patterned beam onto a target portion of the substrate; a measurement system configured to generate an information signal including information about positions of at least one of the patterning device, the substrate, the projection system, and components therein; and a control system configured to control the positions.

REFERENCES:
patent: 6163366 (2000-12-01), Okamoto et al.
patent: 6490025 (2002-12-01), Makinouchi et al.
patent: 6633363 (2003-10-01), Makinouchi
patent: 2005/0128460 (2005-06-01), Van Den Biggelaar et al.
European Search Report issued in EP Application No. 05075859.8 dated Aug. 12, 2005.

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