Lithographic apparatus configured to compensate for...

Details Lithographic apparatus configured to compensate for... Lithographic apparatus configured to compensate for...

2010-09-28

2011-11-29

Young, Christopher (Department: 1721)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C382S145000, C382S149000, C430S030000

Reexamination Certificate

active

08068212

ABSTRACT:
A lithographic apparatus configured to apply corrections to the dose, within and/or between fields, to compensate for critical dimension variations due to heating of elements of the projection system is disclosed.

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