Lithographic apparatus, article support member, and method

Details Lithographic apparatus, article support member, and method Lithographic apparatus, article support member, and method

2006-11-07

2006-11-07

Perkey, W. B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000

Reexamination Certificate

active

07133120

ABSTRACT:
A lithographic apparatus having an illumination system for providing a projection beam of radiation; an article support member for supporting an article to be placed in a beam path of the projection beam of radiation on the article support; and a clamp for providing a clamping pressure for clamping the article against the article support during projection. The article support member includes a section that is trimmed for locally adjusting a clamping pressure.

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