Lithographic apparatus and thermal optical manipulator...

Details Lithographic apparatus and thermal optical manipulator... Lithographic apparatus and thermal optical manipulator...

2007-08-14

2011-11-22

Mack, Ricky (Department: 2873)

Optical: systems and elements

Lens

With support

C359S811000, C359S900000, C219S490000

Reexamination Certificate

active

08064151

ABSTRACT:
A control method is provided for controlling a heating of a thermal optical element, the thermal optical element having a matrix of heater elements. The method includes stabilizing a nominal temperature of the thermal optical element with a feedback loop to control the heating of heater elements; providing a desired temperature profile of the thermal optical element by a set point signal; determining a feedforward control of the heater elements from the set point signal; and forwardly feeding an output of the feedforward control into the feedback loop.

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English translation of Japanese Notice of Reasons for Rejection directed to related Japanese Patent Application No. 2008-203661, from the Japanese Patent Office, mailed Mar. 1, 2011; 4 pages.

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