Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate
2011-08-23
2011-08-23
Lee, John R (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
C355S030000
Reexamination Certificate
active
08003968
ABSTRACT:
A method of helping to prevent liquid reaching under a substrate is disclosed that includes introducing a gas at a bottom edge of the substrate so that a buffer is created at the edge of the substrate, helping to keep immersion liquid that is present at the top and edge of the substrate away from the bottom surface of the substrate.
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“Depth-of-Focus Enhancement Using High Refractive
Jacobs Johannes Henricus Wilhelmus
Kemper Nicolaas Rudolf
Leenders Martinus Hendrikus Antonius
Ottens Joost Jeroen
ASML Netherlands B.V.
Lee John R
Pillsbury Winthrop Shaw & Pittman LLP
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