Lithographic apparatus and stage apparatus

Details Lithographic apparatus and stage apparatus Lithographic apparatus and stage apparatus

2006-02-14

2010-02-23

Glick, Edward J (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000, C355S053000

Reexamination Certificate

active

07667822

ABSTRACT:
A lithographic apparatus includes a support constructed to support a patterning device. The patterning device is capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam. The support includes a force actuator device to exert a force onto the patterning device in a direction of movement of the support. The force actuator device includes a movable part which is pivotably about a pivot axis and thereby connected to the support. The movable part is in the direction of movement of the support substantially balanced with respect to the pivot axis. The force actuator device further includes an actuator to exert via the movable part the force onto the patterning device, to at least partly compensate for the information or a risk of slippage due to acceleration of the support in the direction of movement.

REFERENCES:
patent: 6327026 (2001-12-01), Wakui
patent: 6469773 (2002-10-01), Iwamoto
patent: 2004/0165172 (2004-08-01), Poon et al.
patent: 2005/0030498 (2005-02-01), Mulkens
patent: 2005/0105069 (2005-05-01), Loopstra et al.
patent: 2005/0117142 (2005-06-01), Heerens et al.

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