Lithographic apparatus and sensor calibration method

Details Lithographic apparatus and sensor calibration method Lithographic apparatus and sensor calibration method

2011-08-16

2011-08-16

Glick, Edward J (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S077000

Reexamination Certificate

active

07999912

ABSTRACT:
A method for calibrating an auxiliary sensor system is provided. The auxiliary sensor system measures a position of a grating relative to a reference, the grating forming part of an encoder measurement system. The encoder measurement system is adapted to measure a position of a substrate table of a lithographic apparatus and further comprises a sensor mounted to the substrate table. The method comprises exciting the grating to make a movement in at least one measurement direction of the auxiliary sensor system, obtaining an auxiliary sensor system output signal from the sensor system during the movement, and adjusting a parameter of the auxiliary sensor system based on the output signal obtained during the movement to thereby calibrate the auxiliary sensor system.

REFERENCES:
patent: 2002/0145717 (2002-10-01), Baselmans et al.
patent: 2003/0047674 (2003-03-01), Thornburn et al.
patent: 2004/0263846 (2004-12-01), Kwan
patent: 2005/0274878 (2005-12-01), Goldman et al.
patent: 2002-151405 (2002-05-01), None
patent: 2002/334831 (2002-11-01), None
patent: 2006-054452 (2006-02-01), None
Office Action in related Korean Patent Application 10-2008-0042343 mailed Nov. 19, 2009.
Office Action in related Japanese application No. 2008-119765 mailed Dec. 1, 2010.

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