Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-04-20
2008-03-25
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S075000, C356S500000, C356S509000
Reexamination Certificate
active
07349069
ABSTRACT:
A lithographic apparatus comprises a substrate table to hold a substrate, a reference structure and a measurement system to measure a position of the substrate table with respect to the reference structure. The measurement system comprises a first measurement system to measure a position of the substrate table with respect to an intermediate structure and a second measurement system to measure a position of the intermediate structure with respect to the reference structure. The intermediate structure may be connected or connectable to a drive mechanism to drive the substrate table. A distance between the substrate table and the intermediate structure, resp. a distance between the intermediate structure and the reference structure may be small which results in a highly accurate position measurement.
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Beems Marcel Hendrikus Maria
Sakai Joe
ASML Netherlands B.V.
Rutledge D.
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