Lithographic apparatus and method of manufacturing a device

Details Lithographic apparatus and method of manufacturing a device Lithographic apparatus and method of manufacturing a device

2005-09-20

2005-09-20

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000

Reexamination Certificate

active

06947118

ABSTRACT:
A lithographic apparatus includes a vacuum chamber provided with a first gas evacuator, a conduit in communication with a component inside the vacuum chamber. The apparatus also includes a conduit shield inside the vacuum chamber. The conduit shield provides a conduit path for at least a part of the conduit, and shields the vacuum chamber from the conduit path. The apparatus further includes a gas evacuation shield, extending at least between a gas passage through the conduit shield and a separate gas evacuation feedthrough through a wall of the vacuum chamber. The gas evacuation shield provides a gas evacuation path from the conduit path into an area outside the vacuum chamber, and shields the vacuum chamber from the gas evacuation path.

REFERENCES:
patent: 6633045 (2003-10-01), Sugihara et al.
patent: 6740891 (2004-05-01), Driessen et al.
patent: 6744374 (2004-06-01), Kuenzner
patent: 2003/0137643 (2003-07-01), Jacobs et al.
patent: 1 211 562 (2002-06-01), None

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