Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-07-17
2007-07-17
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S055000, C355S067000, C355S071000, C355S077000, C430S030000, C703S013000
Reexamination Certificate
active
11280985
ABSTRACT:
A method of configuring a transfer of an image of a patterning device pattern onto a substrate with a lithographic apparatus. The method includes determining an intermediate illumination arrangement parameter and an intermediate patterning device parameter by varying an initial illumination arrangement parameter and an initial patterning device parameter using a calibrated model until the calculated image of the pattern printed on the substrate is within predetermined specification; calculating a metric that represents a lithographic response of the printed pattern over a process range, where the pattern would be imaged with the intermediate illumination arrangement and patterning device parameters over the process range, and depending on a result of the metric, adjusting the initial patterning device and illumination arrangement parameters.
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ASML Netherlands B.V.
Mathews Alan
Pillsbury Winthrop Shaw & Pittman LLP
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